Photoresist cross-sectional shape change caused by scanning electron microscope-induced shrinkage
نویسندگان
چکیده
منابع مشابه
the scanning electron microscope
it is only thirteen years since the scanning electron microscope has been available commercially. yet, even in this short period of time, this instrument has been a powerful tool in the investigation of topography, electrical and magnetic properties, crystal structure, cathodoluminescent characteristics etc. of solid specimens. today, this type of microscope has opened its place alongside the c...
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ژورنال
عنوان ژورنال: Journal of Micro/Nanolithography, MEMS, and MOEMS
سال: 2015
ISSN: 1932-5150
DOI: 10.1117/1.jmm.14.3.034001